- What happen?
- AIT key down tool!
- Which tool ?
- INEA03
- Why keydown INEA03?
- Because stain defect be detected after implant
- When stain be detected?
- Earlier this morning
- When affected lot processed in INEA03?
- Two days ago
- How many lots might in risk if impact last from that day?
- Total 31 lots
- Why it is because of INEA03?
- Because the stain-like defect
- What makes INEA03 get wafer stained?