Wk11.3 engineer meeting

  1. Duty roster for leave plan
  2. Implant SPC review, only test wafer or operators issue
  3. Purion H BCD6 poly implant , PR8IPY07A 8D case, the Geographic Parameters Acceptance Test(GPAT) enhance yield lose to ZY
  4. For above alpha poly issue the R&D for the poly film generating and RTP temperature issue, the grain size larger on wafer crown area makes GSD implanted PR8IPY07A Rs higher (the lager the higher)