================================================================== Calculation using SRIM-2006 SRIM version ---> SRIM-2008.04 Calc. date ---> April 30, 2022 ================================================================== Disk File Name = SRIM Outputs\Boron in SiC Ion = Boron [5] , Mass = 11.009 amu Target Density = 2.2871E+00 g/cm3 = 6.8698E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 050.00 070.05 C 6 050.00 029.95 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 4.981E-01 4.018E-01 367 A 181 A 137 A 11.00 keV 5.224E-01 3.914E-01 401 A 194 A 147 A 12.00 keV 5.456E-01 3.816E-01 435 A 206 A 157 A 13.00 keV 5.679E-01 3.723E-01 469 A 218 A 167 A 14.00 keV 5.894E-01 3.635E-01 503 A 230 A 177 A 15.00 keV 6.100E-01 3.552E-01 536 A 242 A 187 A 16.00 keV 6.300E-01 3.473E-01 570 A 253 A 196 A 17.00 keV 6.494E-01 3.398E-01 603 A 263 A 206 A 18.00 keV 6.683E-01 3.326E-01 637 A 274 A 215 A 20.00 keV 7.044E-01 3.194E-01 703 A 294 A 233 A 22.50 keV 7.472E-01 3.044E-01 784 A 317 A 254 A 25.00 keV 7.931E-01 2.911E-01 865 A 339 A 275 A 27.50 keV 8.416E-01 2.790E-01 944 A 360 A 295 A 30.00 keV 8.894E-01 2.681E-01 1021 A 379 A 314 A 32.50 keV 9.351E-01 2.581E-01 1096 A 397 A 332 A 35.00 keV 9.781E-01 2.490E-01 1170 A 413 A 349 A 37.50 keV 1.018E+00 2.406E-01 1243 A 429 A 366 A 40.00 keV 1.056E+00 2.329E-01 1314 A 444 A 382 A 45.00 keV 1.124E+00 2.191E-01 1454 A 471 A 412 A 50.00 keV 1.182E+00 2.070E-01 1591 A 496 A 440 A 55.00 keV 1.234E+00 1.965E-01 1724 A 519 A 466 A 60.00 keV 1.278E+00 1.871E-01 1856 A 541 A 491 A 65.00 keV 1.318E+00 1.787E-01 1985 A 561 A 515 A 70.00 keV 1.353E+00 1.711E-01 2113 A 580 A 538 A 80.00 keV 1.412E+00 1.580E-01 2365 A 615 A 580 A 90.00 keV 1.462E+00 1.471E-01 2613 A 647 A 620 A 100.00 keV 1.505E+00 1.377E-01 2858 A 676 A 657 A 110.00 keV 1.545E+00 1.296E-01 3099 A 704 A 692 A 120.00 keV 1.583E+00 1.226E-01 3338 A 729 A 726 A 130.00 keV 1.619E+00 1.164E-01 3573 A 753 A 758 A 140.00 keV 1.655E+00 1.108E-01 3806 A 775 A 788 A 150.00 keV 1.691E+00 1.058E-01 4035 A 796 A 817 A 160.00 keV 1.727E+00 1.013E-01 4262 A 816 A 845 A 170.00 keV 1.763E+00 9.725E-02 4485 A 835 A 872 A 180.00 keV 1.800E+00 9.353E-02 4705 A 852 A 898 A 200.00 keV 1.877E+00 8.697E-02 5134 A 886 A 946 A 225.00 keV 1.975E+00 8.010E-02 5652 A 923 A 1002 A 250.00 keV 2.076E+00 7.435E-02 6149 A 956 A 1053 A 275.00 keV 2.179E+00 6.945E-02 6626 A 985 A 1099 A 300.00 keV 2.281E+00 6.523E-02 7085 A 1011 A 1142 A 325.00 keV 2.382E+00 6.154E-02 7526 A 1035 A 1181 A 350.00 keV 2.481E+00 5.829E-02 7950 A 1055 A 1217 A 375.00 keV 2.579E+00 5.540E-02 8360 A 1074 A 1251 A 400.00 keV 2.673E+00 5.281E-02 8757 A 1092 A 1282 A 450.00 keV 2.854E+00 4.836E-02 9514 A 1124 A 1338 A 500.00 keV 3.023E+00 4.467E-02 1.02 um 1152 A 1387 A 550.00 keV 3.178E+00 4.156E-02 1.09 um 1176 A 1432 A 600.00 keV 3.322E+00 3.888E-02 1.16 um 1198 A 1471 A 650.00 keV 3.453E+00 3.656E-02 1.22 um 1217 A 1507 A 700.00 keV 3.574E+00 3.453E-02 1.28 um 1234 A 1540 A 800.00 keV 3.783E+00 3.113E-02 1.40 um 1269 A 1599 A 900.00 keV 3.957E+00 2.838E-02 1.51 um 1299 A 1650 A 1.00 MeV 4.101E+00 2.612E-02 1.61 um 1325 A 1695 A 1.10 MeV 4.219E+00 2.422E-02 1.72 um 1349 A 1737 A 1.20 MeV 4.317E+00 2.260E-02 1.82 um 1371 A 1774 A 1.30 MeV 4.397E+00 2.120E-02 1.92 um 1391 A 1809 A 1.40 MeV 4.463E+00 1.997E-02 2.01 um 1409 A 1841 A 1.50 MeV 4.516E+00 1.889E-02 2.11 um 1427 A 1872 A 1.60 MeV 4.560E+00 1.793E-02 2.21 um 1444 A 1901 A 1.70 MeV 4.595E+00 1.707E-02 2.30 um 1460 A 1928 A 1.80 MeV 4.623E+00 1.630E-02 2.39 um 1475 A 1954 A 2.00 MeV 4.662E+00 1.496E-02 2.58 um 1516 A 2004 A 2.25 MeV 4.687E+00 1.358E-02 2.81 um 1571 A 2062 A 2.50 MeV 4.693E+00 1.245E-02 3.05 um 1623 A 2116 A 2.75 MeV 4.688E+00 1.151E-02 3.28 um 1672 A 2167 A 3.00 MeV 4.674E+00 1.071E-02 3.51 um 1720 A 2215 A 3.25 MeV 4.654E+00 1.002E-02 3.74 um 1766 A 2262 A 3.50 MeV 4.629E+00 9.422E-03 3.98 um 1811 A 2308 A 3.75 MeV 4.603E+00 8.895E-03 4.21 um 1856 A 2352 A 4.00 MeV 4.574E+00 8.427E-03 4.45 um 1899 A 2395 A 4.50 MeV 4.512E+00 7.634E-03 4.93 um 2041 A 2480 A 5.00 MeV 4.449E+00 6.985E-03 5.42 um 2177 A 2562 A 5.50 MeV 4.385E+00 6.445E-03 5.91 um 2308 A 2642 A 6.00 MeV 4.321E+00 5.987E-03 6.41 um 2436 A 2721 A 6.50 MeV 4.258E+00 5.594E-03 6.92 um 2560 A 2799 A 7.00 MeV 4.196E+00 5.252E-03 7.43 um 2682 A 2877 A 8.00 MeV 4.077E+00 4.687E-03 8.49 um 3103 A 3031 A 9.00 MeV 3.964E+00 4.237E-03 9.57 um 3495 A 3185 A 10.00 MeV 3.856E+00 3.871E-03 10.69 um 3865 A 3339 A ----------------------------------------------------------- Multiply Stopping by for Stopping Units ------------------- ------------------ 2.2870E+01 eV / Angstrom 2.2870E+02 keV / micron 2.2870E+02 MeV / mm 1.0000E+00 keV / (ug/cm2) 1.0000E+00 MeV / (mg/cm2) 1.0000E+03 keV / (mg/cm2) 3.3291E+01 eV / (1E15 atoms/cm2) 6.1057E-01 L.S.S. reduced units ================================================================== (C) 1984,1989,1992,1998,2008 by J.P. Biersack and J.F. Ziegler