{"id":379,"date":"2019-12-07T22:30:40","date_gmt":"2019-12-07T14:30:40","guid":{"rendered":"http:\/\/47.242.20.44\/?p=379"},"modified":"2019-12-07T22:30:40","modified_gmt":"2019-12-07T14:30:40","slug":"implant%e7%9a%84dose%e5%92%8crs%e7%9a%84%e5%85%b3%e7%b3%bb","status":"publish","type":"post","link":"https:\/\/blog.zengqq.com.cn\/?p=379","title":{"rendered":"implant\u7684dose\u548cRs\u7684\u5173\u7cfb"},"content":{"rendered":"\n
  1. implant\u7684dose\u53ea\u662f\u5bf9\u5355\u4f4d\u9762\u79ef\u4e0a\u7684\u6d53\u5ea6\u8fdb\u884c\u9610\u8ff0\uff0c\u800c\u4e0d\u662f\u5355\u4f4d\u4f53\u79ef\u7684\u5bc6\u5ea6\uff0c\u4ece\u5176\u5355\u4f4d\u4e0a\u770b\u5c31\u80fd\u77e5\u9053 atom\/cm2 (\u5e73\u65b9\u5398\u7c73\uff09\u6240\u63cf\u8ff0\u7684\u6bcf\u5e73\u65b9\u5398\u7c73\u9762\u79ef\u4e0a\u63ba\u6742\u539f\u5b50\u7684\u591a\u5c11\uff0c \u6bd4\u59823.4E15 atom\/cm2 \uff0c\u5176\u6307\u7684\u662f\u5982\u679c\u5728\u4e00\u72478\u5bf8\u7684wafer\u4e0a\uff0c\u603b\u5171\u63ba\u67423.14*10cm*10cm*3.4E15 atom\/cm2=1.07E18 atom\u5728wafer\u91cc\u9762<\/li>
  2. \u800cRs\u5373sheet resist\uff0c\u53c8\u79f0\u4f5c\u65b9\u5757\u7535\u963b\u3002\u4e4b\u6240\u4ee5\u53eb\u65b9\u5757\u7535\u963b\uff0c\u662f\u56e0\u4e3a\u5728\u7814\u7a76\u7535\u6d41\u6d41\u7ecf\u5bfc\u7535\u8584\u819c\u65f6\u6cbf\u7740\u7535\u6d41\u65b9\u5411\uff0c\u6d41\u52a8\u7ecf\u8fc7\u4e00\u6bb5\u8ddd\u79bb\uff08\u8584\u819c\u7684\u957f\u5ea6L\uff09\uff0c\u6a2a\u622a\u9762\u7684\u539a\u5ea6\uff08\u8584\u819c\u7684t\u539a\u5ea6\uff09\uff0c\u4ee5\u53ca\u8584\u819c\u7684\u5bbd\u5ea6\uff08\u622a\u9762\u5ef6\u5c55\u65b9\u5411w\uff09\u662f\u91cd\u70b9\uff0c\u4f46\u662f\u5982\u679c\u8ba9L=W\uff08\u5373\u9e1f\u77b0\u4e3a\u6b63\u65b9\u5f62\u7684\u5bfc\u4f53\u5f62\u72b6\uff09\uff0c\u90a3\u4e48\u6b64\u533a\u57df\u7684\u7535\u963b\u5c31\u4e0d\u53d7\u7535\u6d41\u65b9\u5411\u5f71\u54cd\uff0c\u53ea\u53d7Rs\u548ct\u7684\u5f71\u54cd\uff0c\u4ece\u800c\u53ef\u4ee5\u7b80\u5355\u7684\u63cf\u8ff0\u7535\u963bR: \"\"<\/li>
  3. \u5bf9\u4e8e\u5df2\u77e5\u7684implantation\uff0c\u6211\u4eec\u81f3\u5c11\u77e5\u9053\u5b83\u7684\u8f70\u51fb\u80fd\u91cfEnergy (Kev)\uff0c\u88ab\u8f70\u51fbwafer\u7684\u672c\u5f81\u6d53\u5ea6N0\u6216\u8005\u9884\u63ba\u6742\u6d53\u5ea6Nx\uff0c\u690d\u5165\u539f\u5b50\u7684\u79cd\u7c7b\u548c\u6570\u91cfQ\u6216dose(atom\/cm2)\uff1b\u90a3\u4e48\u6211\u5c31\u6839\u636eEnergy\u8ba1\u7b97\u51fa\u690d\u5165\u6df1\u5ea6PR(Project Range)\uff0cPN\u7ed3\u7684\u6df1\u5ea6Xj\uff0c\u5cf0\u503c\u6d53\u5ea6Np\uff08N of Peak)\uff1b\u5bf9\u4e8e\u9ad8\u65af\u5206\u5e03\u7684\u690d\u5165\u539f\u5b50\u6765\u8bf4\uff0c\u6839\u636e\u80fd\u91cf\u548c\u539f\u5b50\u79cd\u7c7b\uff0c\u6211\u4eec\u67e5\u8868\u6216\u8005\u67e5\u56fe\u53ef\u5f97\u5230PR\u548cstraggle\uff08Delta Rp\uff09 \"\"\"\"<\/li>
  4. \u6709\u4e86\u8fd9\u4e9b\u6570\u636e\uff0c \u6211\u4eec\u5c31\u80fd\u5bf9\u7ed3\u6df1\u8303\u56f4\u4ee5\u5185\u9ad8\u65af\u5206\u5e03\u7684\u63ba\u6742\u8fdb\u884c\u5b9a\u79ef\u5206\uff0c\u5373\u4eceXj (um)\u52300 (um)\u5b9a\u79ef\u5206\uff08\u8bf7\u76f4\u63a5\u67e5\u770b\u9ad8\u65af\u5206\u5e03\u7684\u5b9a\u79ef\u5206\uff09\uff0cu(X)\u8868\u793a\u5bf9\u5e94X\u4f4d\u7f6e\u7684\u8f7d\u6d41\u5b50\u6d53\u5ea6,\u5047\u8bbe\u6240\u6709\u63ba\u6742\u539f\u5b50\u90fd100%\u6210\u4e3a\u8f7d\u6d41\u5b50,\u4ee5\u5bf9P type(pre-dope boron)\u4e3a\u4f8b\u5b50\uff0c\u5411\u5176\u4e2dimplant N \u578b\u6742\u8d28C(x)>>C(B)…………………………. \"\"….\"\"<\/li>
  5. \u4f8b\u9898\u53c2\u8003\uff1a
    1. \u6c42\u5cf0\u503cNp\u6216\u8005\u5199\u6210Cp\uff1a\u5bf9\u4e8e\u6839\u53f7\u4e0b\u7684\u4e24\u500d\u5706\u5468\u7387\uff0c\u6211\u4eec\u53d6\u503c\u8fd1\u4f3c\u4e3a2.5\uff1b\u800cimplant\u7684dose\u9664\u4ee52.5\uff0c\u5c31\u662f0.4E13<\/li>
    2. \u6c42\u7ed3\u6df1<\/li>
    3. \u63ba\u6742\u6d53\u5ea6\u8fdc\u8fdc\u9ad8\u4e8ewafer\u7684\u672c\u5f81\u6d53\u5ea6\uff0c\u4e5f\u8fdc\u8fdc\u9ad8\u4e8e\u9884\u5148B\u63ba\u6742\u6d53\u5ea6\uff0c\u6240\u4ee5\u8fd1\u4f3c\u5730\u3002\u76f4\u63a5\u5229\u7528implant\u7684\u6d53\u5ea6\u8fd1\u4f3c\u8ba1\u7b97<\/li>
    4. \"\"\"\"<\/li>
    5. \u4ee5\u4e0a\u76f8\u5173\u7684\u8ba1\u7b97excel\u811a\u672c<\/li><\/ol><\/li><\/ol>\n\n\n\n
      Rs and Mobility Calculator<\/a>\u4e0b\u8f7d<\/a><\/div>\n\n\n\n

      <\/p>\n","protected":false},"excerpt":{"rendered":"

      implant\u7684dose\u53ea\u662f\u5bf9\u5355\u4f4d\u9762\u79ef\u4e0a\u7684\u6d53\u5ea6\u8fdb\u884c […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[89],"tags":[],"class_list":["post-379","post","type-post","status-publish","format-standard","hentry","category-live"],"_links":{"self":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/379","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=379"}],"version-history":[{"count":0,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/379\/revisions"}],"wp:attachment":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=379"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=379"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=379"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}