\u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc<\/title>\n \n <script>\n MathJax = {\n tex: {\n inlineMath: [['$', '$'], ['\\\$', '\\\$']],\n displayMath: [['$$', '$$'], ['\\\\[', '\\\\]']]\n }\n };\n <\/script>\n <script id=\"MathJax-script\" async src=\"https:\/\/cdn.jsdelivr.net\/npm\/mathjax@3\/es5\/tex-mml-chtml.js\"><\/script>\n <style>\n * {\n box-sizing: border-box;\n }\n body {\n font-family: -apple-system, BlinkMacSystemFont, \"Segoe UI\", Roboto, \"Helvetica Neue\", Arial, sans-serif;\n line-height: 1.75;\n color: #2c3e50;\n margin: 0;\n padding: 20px 0;\n background-color: #f8f9fa;\n width: 100%;\n }\n .container {\n width: 92%;\n max-width: 1400px;\n margin: 0 auto;\n background: #ffffff;\n padding: clamp(20px, 4vw, 45px);\n border-radius: 12px;\n box-shadow: 0 4px 20px rgba(0, 0, 0, 0.08);\n }\n h1 {\n border-bottom: 3px solid #3498db;\n padding-bottom: 12px;\n color: #1a252f;\n font-size: clamp(20px, 2.5vw, 28px);\n word-break: break-word;\n }\n h2 {\n color: #2980b9;\n margin-top: 32px;\n border-bottom: 1px solid #ecf0f1;\n padding-bottom: 8px;\n font-size: clamp(17px, 2vw, 22px);\n }\n ul, ol {\n padding-left: 1.5rem;\n }\n li {\n margin-bottom: 10px;\n }\n .formula-box {\n background-color: #f1f8ff;\n border-left: 4px solid #3498db;\n padding: 16px 20px;\n margin: 20px 0;\n border-radius: 4px;\n overflow-x: auto;\n }\n \/* \u4fdd\u8bc1 MathJax \u663e\u793a\u516c\u5f0f\u5728\u5c0f\u5c4f\u4e0b\u53ef\u6c34\u5e73\u6eda\u52a8\uff0c\u9632\u6b62\u7834\u7248 *\/\n .MathJax_Display, .mjx-chtml {\n overflow-x: auto !important;\n overflow-y: hidden !important;\n max-width: 100% !important;\n padding: 4px 0;\n }\n .highlight {\n font-weight: bold;\n color: #16a085;\n }\n code {\n background: #eef2f7;\n padding: 2px 6px;\n border-radius: 4px;\n font-family: \"Courier New\", Courier, monospace;\n word-break: break-word;\n }\n @media (max-width: 768px) {\n body {\n padding: 10px 0;\n }\n .container {\n width: 96%;\n padding: 16px 12px;\n }\n ul, ol {\n padding-left: 1.2rem;\n }\n }\n <\/style>\n<\/head>\n<body>\n <div class=\"container\">\n <h1>\u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc<\/h1>\n \n <div class=\"formula-box\">\n <strong>\u6838\u5fc3\u6a21\u578b\u516c\u5f0f\uff1a<\/strong>\n $$N(x) = N_0 \\cdot \\exp(-\\sigma \\cdot n \\cdot x)$$\n <\/div>\n\n <p>\u5728\u79bb\u5b50\u6ce8\u5165\u673a\uff08\u5982 Axcelis GSD\uff09\u4e2d\uff0c\u8be5\u516c\u5f0f\u7528\u4e8e\u63cf\u8ff0\u5e26\u6b63\u7535\u7684\u79bb\u5b50\u7a7f\u8fc7\u6c14\u4f53\u533a\u57df\u65f6\uff0c\u56e0\u6355\u83b7\u7535\u5b50\u53d1\u751f\u7535\u8377\u4ea4\u6362\u4e2d\u548c\u800c\u5bfc\u81f4\u7684\u675f\u6d41\u8870\u51cf\u3002<\/p>\n\n <h2>1. \u7269\u7406\u7406\u8bba\u57fa\u7840<\/h2>\n <ul>\n <li><span class=\"highlight\">\u78b0\u649e\u622a\u9762 ($\\sigma$)\uff1a<\/span> \u5c06\u5355\u4e2a\u6c14\u4f53\u5206\u5b50\u62bd\u8c61\u4e3a\u4e00\u4e2a\u6709\u6548\u78b0\u649e\u9776\u9762\u79ef $\\sigma$\uff08\u5355\u4f4d\uff1a$\\text{m}^2$\uff09\u3002\u5f53\u79bb\u5b50\u7a7f\u8fc7\u8be5\u533a\u57df\u65f6\uff0c\u4f1a\u4e0e\u6c14\u4f53\u539f\u5b50\u53d1\u751f\u5e93\u4ed1\u5f15\u529b\u76f8\u4e92\u4f5c\u7528\u5e76\u6355\u83b7\u7535\u5b50\u3002<\/li>\n <li><span class=\"highlight\">\u6c14\u4f53\u9776\u5bc6\u5ea6 ($n$)\uff1a<\/span> \u5355\u4f4d\u4f53\u79ef\u5185\u7684\u6c14\u4f53\u5206\u5b50\u6570\u91cf\u4e3a $n$\uff08\u5355\u4f4d\uff1a$\\text{m}^{-3}$\uff09\u3002<\/li>\n <li><span class=\"highlight\">\u5fae\u5143\u4e2d\u548c\u6982\u7387\uff1a<\/span> \u5f53\u79bb\u5b50\u675f\u7a7f\u8fc7\u539a\u5ea6\u4e3a $dx$ \u7684\u5fae\u5143\u6c14\u4f53\u5c42\u65f6\uff0c\u5355\u4e2a\u79bb\u5b50\u53d1\u751f\u7535\u8377\u4ea4\u6362\u4e2d\u548c\u7684\u7269\u7406\u6982\u7387\u4e3a\uff1a\n $$P(\\text{neutralization}) = \\sigma \\cdot n \\cdot dx$$\n <\/li>\n <\/ul>\n\n <h2>2. \u6570\u5b66\u63a8\u5bfc\u8fc7\u7a0b\uff08\u5fae\u5206\u65b9\u7a0b\u6cd5\uff09<\/h2>\n <ol>\n <li>\n <strong>\u5efa\u7acb\u5fae\u5206\u53d8\u5316\u91cf\u65b9\u7a0b\uff1a<\/strong><br>\n \u8bbe\u5728\u8def\u5f84\u4f4d\u7f6e $x$ \u5904\uff0c\u5c1a\u672a\u88ab\u4e2d\u548c\u7684\u79bb\u5b50\u6570\u91cf\u4e3a $N(x)$\u3002\u5f53\u79bb\u5b50\u675f\u7a7f\u8fc7\u65e0\u9650\u5c0f\u8ddd\u79bb $dx$ \u65f6\uff0c\u635f\u5931\u7684\u79bb\u5b50\u6570\u91cf $dN$ \u6b63\u6bd4\u4e8e\u5f53\u524d\u79bb\u5b50\u6570\u53ca\u4e2d\u548c\u6982\u7387\uff1a\n $$dN = – N(x) \\cdot \\sigma \\cdot n \\cdot dx$$\n <em>\uff08\u8d1f\u53f7\u8868\u793a\u672a\u4e2d\u548c\u79bb\u5b50\u6570\u91cf\u968f\u4f20\u8f93\u8ddd\u79bb\u589e\u52a0\u800c\u51cf\u5c11\uff09<\/em>\n <\/li>\n <li>\n <strong>\u5206\u79bb\u53d8\u91cf\uff1a<\/strong><br>\n $$\\frac{dN}{N(x)} = – \\sigma \\cdot n \\cdot dx$$\n <\/li>\n <li>\n <strong>\u5b9a\u79ef\u5206\u4e0e\u8fb9\u754c\u6761\u4ef6\uff1a<\/strong><br>\n \u521d\u59cb\u6761\u4ef6 $x = 0$ \u65f6\u672a\u4e2d\u548c\u79bb\u5b50\u6570\u4e3a $N(0) = N_0$\uff1b\u672b\u6001\u6761\u4ef6\u4e3a $N(x)$\u3002\u5047\u8bbe $\\sigma$ \u4e0e $n$ \u6cbf\u8def\u5f84\u5747\u5300\u6052\u5b9a\uff0c\u5bf9\u4e24\u4fa7\u8fdb\u884c\u5b9a\u79ef\u5206\uff1a\n $$\\int_{N_0}^{N(x)} \\frac{1}{N’} \\, dN’ = \\int_{0}^{x} – \\sigma \\cdot n \\, dx’$$\n $$\\ln(N(x)) – \\ln(N_0) = – \\sigma \\cdot n \\cdot x$$\n $$\\ln\\left(\\frac{N(x)}{N_0}\\right) = – \\sigma \\cdot n \\cdot x$$\n <\/li>\n <li>\n <strong>\u6307\u6570\u6c42\u89e3\uff1a<\/strong><br>\n \u4e24\u8fb9\u53d6\u81ea\u7136\u6307\u6570 $\\exp$\uff0c\u5bfc\u51fa\u8870\u51cf\u516c\u5f0f\uff1a\n $$N(x) = N_0 \\cdot \\exp(-\\sigma \\cdot n \\cdot x)$$\n <\/li>\n <\/ol>\n\n <h2>3. \u7b49\u4ef7\u7684\u7269\u7406\u4e0e\u7edf\u8ba1\u6a21\u578b<\/h2>\n <ul>\n <li><span class=\"highlight\">\u6717\u4f2f-\u6bd4\u5c14\u5b9a\u5f8b (Beer-Lambert Law)\uff1a<\/span> \u5149\u5f3a\/\u5c04\u7ebf\u7a7f\u8fc7\u4ecb\u8d28\u65f6\u7684\u8870\u51cf\u516c\u5f0f $I = I_0 e^{-\\alpha x}$ \u4e0e\u6b64\u5b8c\u5168\u540c\u6784\uff08$\\alpha = \\sigma n$ \u4e3a\u8870\u51cf\u7cfb\u6570\uff09\u3002<\/li>\n <li><span class=\"highlight\">\u5e73\u5747\u81ea\u7531\u7a0b ($\\lambda$)\uff1a<\/span> \u5b9a\u4e49\u5e73\u5747\u4e2d\u548c\u81ea\u7531\u7a0b\u4e3a $\\lambda = \\frac{1}{\\sigma \\cdot n}$\uff0c\u4ee3\u5165\u540e\u516c\u5f0f\u53ef\u5199\u4e3a\uff1a\n $$N(x) = N_0 \\cdot \\exp\\left(-\\frac{x}{\\lambda}\\right)$$\n <\/li>\n <li><span class=\"highlight\">\u6cca\u677e\u8fc7\u7a0b (Poisson Process)\uff1a<\/span> \u5355\u6b21\u78b0\u649e\u4e3a\u72ec\u7acb\u968f\u673a\u4e8b\u4ef6\uff0c\u672a\u53d1\u751f\u4e2d\u548c\u78b0\u649e\u7684\u6982\u7387\u670d\u4ece\u6cca\u677e\u5206\u5e03\u7684\u96f6\u4e8b\u4ef6\u6982\u7387 $P(K=0) = e^{-\\mu}$\uff0c\u5176\u4e2d\u671f\u671b\u78b0\u649e\u6b21\u6570 $\\mu = \\sigma n x$\u3002<\/li>\n <\/ul>\n\n <h2>4. \u5728\u6ce8\u5165\u673a\u538b\u529b\u8865\u507f ($pcomp$) \u4e2d\u7684\u5de5\u7a0b\u5e94\u7528<\/h2>\n <p>\u5229\u7528\u7406\u60f3\u6c14\u4f53\u72b6\u6001\u65b9\u7a0b $n = \\frac{p}{k_B T}$ \u5c06\u5fae\u89c2\u5bc6\u5ea6\u8f6c\u5316\u4e3a\u5b8f\u89c2\u538b\u529b $p$\uff1a<\/p>\n $$N(x) = N_0 \\cdot \\exp\\left(-\\frac{\\sigma \\cdot x}{k_B T} \\cdot p\\right)$$\n <p>Axcelis GSD \u7cfb\u7edf\u5728\u6b64\u6a21\u578b\u57fa\u7840\u4e0a\u5b9a\u4e49\u4e86\u538b\u529b\u8865\u507f\u7cfb\u6570 $pcomp$\uff0c\u5b9e\u65f6\u8ba1\u7b97\u771f\u5b9e\u675f\u6d41 $I_0$\uff1a<\/p>\n $$I_0 = I_m \\cdot \\exp\\left( \\frac{p}{p_0} \\cdot \\ln\\left(1 + \\frac{pcomp}{100}\\right) \\right)$$\n <\/div>\n<\/body>\n","protected":false},"excerpt":{"rendered":"<p>\u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc \u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66 […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[89],"tags":[],"class_list":["post-3672","post","type-post","status-publish","format-standard","hentry","category-live"],"_links":{"self":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/3672","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3672"}],"version-history":[{"count":4,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/3672\/revisions"}],"predecessor-version":[{"id":3678,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/3672\/revisions\/3678"}],"wp:attachment":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3672"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3672"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3672"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}

{"id":3672,"date":"2026-10-10T23:47:51","date_gmt":"2026-10-10T15:47:51","guid":{"rendered":"https:\/\/blog.zengqq.com.cn\/?p=3672"},"modified":"2026-10-10T23:57:20","modified_gmt":"2026-10-10T15:57:20","slug":"pcomp%e7%9a%84%e5%87%86%e5%a4%87%e7%9f%a5%e8%af%86%ef%bc%9a%e7%a6%bb%e5%ad%90%e6%9d%9f%e8%a1%b0%e5%87%8f%e6%a8%a1%e5%9e%8b%e4%b8%8e%e6%95%b0%e5%ad%a6%e7%89%a9%e7%90%86%e6%8e%a8%e5%af%bc","status":"publish","type":"post","link":"https:\/\/blog.zengqq.com.cn\/?p=3672","title":{"rendered":"Pcomp\u7684\u51c6\u5907\u77e5\u8bc6\uff1a\u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc"},"content":{"rendered":"\n\n\n \n \n \u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc<\/title>\n \n <script>\n MathJax = {\n tex: {\n inlineMath: [['$', '$'], ['\\\$', '\\\$']],\n displayMath: [['$$', '$$'], ['\\\\[', '\\\\]']]\n }\n };\n <\/script>\n <script id=\"MathJax-script\" async src=\"https:\/\/cdn.jsdelivr.net\/npm\/mathjax@3\/es5\/tex-mml-chtml.js\"><\/script>\n <style>\n * {\n box-sizing: border-box;\n }\n body {\n font-family: -apple-system, BlinkMacSystemFont, \"Segoe UI\", Roboto, \"Helvetica Neue\", Arial, sans-serif;\n line-height: 1.75;\n color: #2c3e50;\n margin: 0;\n padding: 20px 0;\n background-color: #f8f9fa;\n width: 100%;\n }\n .container {\n width: 92%;\n max-width: 1400px;\n margin: 0 auto;\n background: #ffffff;\n padding: clamp(20px, 4vw, 45px);\n border-radius: 12px;\n box-shadow: 0 4px 20px rgba(0, 0, 0, 0.08);\n }\n h1 {\n border-bottom: 3px solid #3498db;\n padding-bottom: 12px;\n color: #1a252f;\n font-size: clamp(20px, 2.5vw, 28px);\n word-break: break-word;\n }\n h2 {\n color: #2980b9;\n margin-top: 32px;\n border-bottom: 1px solid #ecf0f1;\n padding-bottom: 8px;\n font-size: clamp(17px, 2vw, 22px);\n }\n ul, ol {\n padding-left: 1.5rem;\n }\n li {\n margin-bottom: 10px;\n }\n .formula-box {\n background-color: #f1f8ff;\n border-left: 4px solid #3498db;\n padding: 16px 20px;\n margin: 20px 0;\n border-radius: 4px;\n overflow-x: auto;\n }\n \/* \u4fdd\u8bc1 MathJax \u663e\u793a\u516c\u5f0f\u5728\u5c0f\u5c4f\u4e0b\u53ef\u6c34\u5e73\u6eda\u52a8\uff0c\u9632\u6b62\u7834\u7248 *\/\n .MathJax_Display, .mjx-chtml {\n overflow-x: auto !important;\n overflow-y: hidden !important;\n max-width: 100% !important;\n padding: 4px 0;\n }\n .highlight {\n font-weight: bold;\n color: #16a085;\n }\n code {\n background: #eef2f7;\n padding: 2px 6px;\n border-radius: 4px;\n font-family: \"Courier New\", Courier, monospace;\n word-break: break-word;\n }\n @media (max-width: 768px) {\n body {\n padding: 10px 0;\n }\n .container {\n width: 96%;\n padding: 16px 12px;\n }\n ul, ol {\n padding-left: 1.2rem;\n }\n }\n <\/style>\n<\/head>\n<body>\n <div class=\"container\">\n <h1>\u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc<\/h1>\n \n <div class=\"formula-box\">\n <strong>\u6838\u5fc3\u6a21\u578b\u516c\u5f0f\uff1a<\/strong>\n $$N(x) = N_0 \\cdot \\exp(-\\sigma \\cdot n \\cdot x)$$\n <\/div>\n\n <p>\u5728\u79bb\u5b50\u6ce8\u5165\u673a\uff08\u5982 Axcelis GSD\uff09\u4e2d\uff0c\u8be5\u516c\u5f0f\u7528\u4e8e\u63cf\u8ff0\u5e26\u6b63\u7535\u7684\u79bb\u5b50\u7a7f\u8fc7\u6c14\u4f53\u533a\u57df\u65f6\uff0c\u56e0\u6355\u83b7\u7535\u5b50\u53d1\u751f\u7535\u8377\u4ea4\u6362\u4e2d\u548c\u800c\u5bfc\u81f4\u7684\u675f\u6d41\u8870\u51cf\u3002<\/p>\n\n <h2>1. \u7269\u7406\u7406\u8bba\u57fa\u7840<\/h2>\n <ul>\n <li><span class=\"highlight\">\u78b0\u649e\u622a\u9762 ($\\sigma$)\uff1a<\/span> \u5c06\u5355\u4e2a\u6c14\u4f53\u5206\u5b50\u62bd\u8c61\u4e3a\u4e00\u4e2a\u6709\u6548\u78b0\u649e\u9776\u9762\u79ef $\\sigma$\uff08\u5355\u4f4d\uff1a$\\text{m}^2$\uff09\u3002\u5f53\u79bb\u5b50\u7a7f\u8fc7\u8be5\u533a\u57df\u65f6\uff0c\u4f1a\u4e0e\u6c14\u4f53\u539f\u5b50\u53d1\u751f\u5e93\u4ed1\u5f15\u529b\u76f8\u4e92\u4f5c\u7528\u5e76\u6355\u83b7\u7535\u5b50\u3002<\/li>\n <li><span class=\"highlight\">\u6c14\u4f53\u9776\u5bc6\u5ea6 ($n$)\uff1a<\/span> \u5355\u4f4d\u4f53\u79ef\u5185\u7684\u6c14\u4f53\u5206\u5b50\u6570\u91cf\u4e3a $n$\uff08\u5355\u4f4d\uff1a$\\text{m}^{-3}$\uff09\u3002<\/li>\n <li><span class=\"highlight\">\u5fae\u5143\u4e2d\u548c\u6982\u7387\uff1a<\/span> \u5f53\u79bb\u5b50\u675f\u7a7f\u8fc7\u539a\u5ea6\u4e3a $dx$ \u7684\u5fae\u5143\u6c14\u4f53\u5c42\u65f6\uff0c\u5355\u4e2a\u79bb\u5b50\u53d1\u751f\u7535\u8377\u4ea4\u6362\u4e2d\u548c\u7684\u7269\u7406\u6982\u7387\u4e3a\uff1a\n $$P(\\text{neutralization}) = \\sigma \\cdot n \\cdot dx$$\n <\/li>\n <\/ul>\n\n <h2>2. \u6570\u5b66\u63a8\u5bfc\u8fc7\u7a0b\uff08\u5fae\u5206\u65b9\u7a0b\u6cd5\uff09<\/h2>\n <ol>\n <li>\n <strong>\u5efa\u7acb\u5fae\u5206\u53d8\u5316\u91cf\u65b9\u7a0b\uff1a<\/strong><br>\n \u8bbe\u5728\u8def\u5f84\u4f4d\u7f6e $x$ \u5904\uff0c\u5c1a\u672a\u88ab\u4e2d\u548c\u7684\u79bb\u5b50\u6570\u91cf\u4e3a $N(x)$\u3002\u5f53\u79bb\u5b50\u675f\u7a7f\u8fc7\u65e0\u9650\u5c0f\u8ddd\u79bb $dx$ \u65f6\uff0c\u635f\u5931\u7684\u79bb\u5b50\u6570\u91cf $dN$ \u6b63\u6bd4\u4e8e\u5f53\u524d\u79bb\u5b50\u6570\u53ca\u4e2d\u548c\u6982\u7387\uff1a\n $$dN = – N(x) \\cdot \\sigma \\cdot n \\cdot dx$$\n <em>\uff08\u8d1f\u53f7\u8868\u793a\u672a\u4e2d\u548c\u79bb\u5b50\u6570\u91cf\u968f\u4f20\u8f93\u8ddd\u79bb\u589e\u52a0\u800c\u51cf\u5c11\uff09<\/em>\n <\/li>\n <li>\n <strong>\u5206\u79bb\u53d8\u91cf\uff1a<\/strong><br>\n $$\\frac{dN}{N(x)} = – \\sigma \\cdot n \\cdot dx$$\n <\/li>\n <li>\n <strong>\u5b9a\u79ef\u5206\u4e0e\u8fb9\u754c\u6761\u4ef6\uff1a<\/strong><br>\n \u521d\u59cb\u6761\u4ef6 $x = 0$ \u65f6\u672a\u4e2d\u548c\u79bb\u5b50\u6570\u4e3a $N(0) = N_0$\uff1b\u672b\u6001\u6761\u4ef6\u4e3a $N(x)$\u3002\u5047\u8bbe $\\sigma$ \u4e0e $n$ \u6cbf\u8def\u5f84\u5747\u5300\u6052\u5b9a\uff0c\u5bf9\u4e24\u4fa7\u8fdb\u884c\u5b9a\u79ef\u5206\uff1a\n $$\\int_{N_0}^{N(x)} \\frac{1}{N’} \\, dN’ = \\int_{0}^{x} – \\sigma \\cdot n \\, dx’$$\n $$\\ln(N(x)) – \\ln(N_0) = – \\sigma \\cdot n \\cdot x$$\n $$\\ln\\left(\\frac{N(x)}{N_0}\\right) = – \\sigma \\cdot n \\cdot x$$\n <\/li>\n <li>\n <strong>\u6307\u6570\u6c42\u89e3\uff1a<\/strong><br>\n \u4e24\u8fb9\u53d6\u81ea\u7136\u6307\u6570 $\\exp$\uff0c\u5bfc\u51fa\u8870\u51cf\u516c\u5f0f\uff1a\n $$N(x) = N_0 \\cdot \\exp(-\\sigma \\cdot n \\cdot x)$$\n <\/li>\n <\/ol>\n\n <h2>3. \u7b49\u4ef7\u7684\u7269\u7406\u4e0e\u7edf\u8ba1\u6a21\u578b<\/h2>\n <ul>\n <li><span class=\"highlight\">\u6717\u4f2f-\u6bd4\u5c14\u5b9a\u5f8b (Beer-Lambert Law)\uff1a<\/span> \u5149\u5f3a\/\u5c04\u7ebf\u7a7f\u8fc7\u4ecb\u8d28\u65f6\u7684\u8870\u51cf\u516c\u5f0f $I = I_0 e^{-\\alpha x}$ \u4e0e\u6b64\u5b8c\u5168\u540c\u6784\uff08$\\alpha = \\sigma n$ \u4e3a\u8870\u51cf\u7cfb\u6570\uff09\u3002<\/li>\n <li><span class=\"highlight\">\u5e73\u5747\u81ea\u7531\u7a0b ($\\lambda$)\uff1a<\/span> \u5b9a\u4e49\u5e73\u5747\u4e2d\u548c\u81ea\u7531\u7a0b\u4e3a $\\lambda = \\frac{1}{\\sigma \\cdot n}$\uff0c\u4ee3\u5165\u540e\u516c\u5f0f\u53ef\u5199\u4e3a\uff1a\n $$N(x) = N_0 \\cdot \\exp\\left(-\\frac{x}{\\lambda}\\right)$$\n <\/li>\n <li><span class=\"highlight\">\u6cca\u677e\u8fc7\u7a0b (Poisson Process)\uff1a<\/span> \u5355\u6b21\u78b0\u649e\u4e3a\u72ec\u7acb\u968f\u673a\u4e8b\u4ef6\uff0c\u672a\u53d1\u751f\u4e2d\u548c\u78b0\u649e\u7684\u6982\u7387\u670d\u4ece\u6cca\u677e\u5206\u5e03\u7684\u96f6\u4e8b\u4ef6\u6982\u7387 $P(K=0) = e^{-\\mu}$\uff0c\u5176\u4e2d\u671f\u671b\u78b0\u649e\u6b21\u6570 $\\mu = \\sigma n x$\u3002<\/li>\n <\/ul>\n\n <h2>4. \u5728\u6ce8\u5165\u673a\u538b\u529b\u8865\u507f ($pcomp$) \u4e2d\u7684\u5de5\u7a0b\u5e94\u7528<\/h2>\n <p>\u5229\u7528\u7406\u60f3\u6c14\u4f53\u72b6\u6001\u65b9\u7a0b $n = \\frac{p}{k_B T}$ \u5c06\u5fae\u89c2\u5bc6\u5ea6\u8f6c\u5316\u4e3a\u5b8f\u89c2\u538b\u529b $p$\uff1a<\/p>\n $$N(x) = N_0 \\cdot \\exp\\left(-\\frac{\\sigma \\cdot x}{k_B T} \\cdot p\\right)$$\n <p>Axcelis GSD \u7cfb\u7edf\u5728\u6b64\u6a21\u578b\u57fa\u7840\u4e0a\u5b9a\u4e49\u4e86\u538b\u529b\u8865\u507f\u7cfb\u6570 $pcomp$\uff0c\u5b9e\u65f6\u8ba1\u7b97\u771f\u5b9e\u675f\u6d41 $I_0$\uff1a<\/p>\n $$I_0 = I_m \\cdot \\exp\\left( \\frac{p}{p_0} \\cdot \\ln\\left(1 + \\frac{pcomp}{100}\\right) \\right)$$\n <\/div>\n<\/body>\n","protected":false},"excerpt":{"rendered":"<p>\u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66\u7269\u7406\u63a8\u5bfc \u79bb\u5b50\u675f\u8870\u51cf\u6a21\u578b\u4e0e\u6570\u5b66 […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[89],"tags":[],"class_list":["post-3672","post","type-post","status-publish","format-standard","hentry","category-live"],"_links":{"self":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/3672","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=3672"}],"version-history":[{"count":4,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/3672\/revisions"}],"predecessor-version":[{"id":3678,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/3672\/revisions\/3678"}],"wp:attachment":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=3672"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=3672"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=3672"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}