{"id":282,"date":"2019-09-11T07:30:39","date_gmt":"2019-09-10T23:30:39","guid":{"rendered":"http:\/\/47.242.20.44\/?p=282"},"modified":"2022-08-09T19:12:31","modified_gmt":"2022-08-09T11:12:31","slug":"282","status":"publish","type":"post","link":"https:\/\/blog.zengqq.com.cn\/?p=282","title":{"rendered":"Implant PR &#038; Straggle \u8ba1\u7b97\u5668"},"content":{"rendered":"\n\n<!-- saved from url=(0102)file:\/\/\/C:\/Users\/Administrator\/Desktop\/My%20Projected%20Ion%20Range%20and%20Straggle%20Calculator.html -->\n\n  \n  <div class=\"field field-name-body field-type-text-with-summary field-label-hidden\"><div class=\"field-items\"><div class=\"field-item even\" property=\"content:encoded\"><form name=\"SimpleCalc\" id=\"SimpleCalc\">\n<script language=\"javascript\">\n<!--\/\/--><![CDATA[\/\/ ><!--\n\n  function Calculate(){\n   with(document.SimpleCalc){\n    if((IonEnergy.value < 0) || (IonEnergy.value > 200)){\n     Range.value='Error';\n     Straggle.value='Error';\n     return;    \n    }    \n    RAs_AmorSi = new Array(0, 0.0097, 0.0159, 0.0215, 0.0269, 0.0322, 0.0374, 0.0426, 0.0478, 0.0530, 0.0582, 0.0634, 0.0686, 0.0739, 0.0791, 0.0845, 0.0898, 0.0952, 0.1005, 0.1060, 0.1114);\n    SAs_AmorSi = new Array(0, 0.0036, 0.0059, 0.0080, 0.0099, 0.0118, 0.0136, 0.0154, 0.0172, 0.0189, 0.0207, 0.0224, 0.0241, 0.0258, 0.0275, 0.0292, 0.0308, 0.0325, 0.0341, 0.0358, 0.0374);\n    RB_AmorSi = new Array(0, 0.0333, 0.0662, 0.0987, 0.1302, 0.1608, 0.1903, 0.2188, 0.2465, 0.2733, 0.2994, 0.3248, 0.3496, 0.3737, 0.3974, 0.4205, 0.4432, 0.4654, 0.4872, 0.5086, 0.5297);\n    SB_AmorSi = new Array(0, 0.0171, 0.0283, 0.0371, 0.0443, 0.0504, 0.0556, 0.0601, 0.0641, 0.0677, 0.0710, 0.0739, 0.0766, 0.0790, 0.0813, 0.0834, 0.0854, 0.0872, 0.0890, 0.0906, 0.0921);\n    RP_AmorSi = new Array(0, 0.0139, 0.0253, 0.0368, 0.0486, 0.0607, 0.0730, 0.0855, 0.0981, 0.1109, 0.1238, 0.1367, 0.1497, 0.1627, 0.1757, 0.1888, 0.2019, 0.2149, 0.2279, 0.2409, 0.2539);\n    SP_AmorSi = new Array (0, 0.0069, 0.0119, 0.0166, 0.0212, 0.0256, 0.0298, 0.0340, 0.0380, 0.0418, 0.0456, 0.0492, 0.0528, 0.0562, 0.0595, 0.0628, 0.0659, 0.0689, 0.0719, 0.0747, 0.0775);\n    RAs_SiO2 = new Array (0, 0.0077, 0.0127, 0.0173, 0.0217, 0.0260, 0.0303, 0.0346, 0.0388, 0.0431, 0.0473, 0.0516, 0.0559, 0.0603, 0.0646, 0.0690, 0.0734, 0.0778, 0.0823, 0.0868, 0.0913);\n    SAs_SiO2 = new Array (0, 0.0026, 0.0043, 0.0057, 0.0072, 0.0085, 0.0099, 0.0112, 0.0125, 0.0138, 0.0151, 0.0164, 0.0176, 0.0189, 0.0201, 0.0214, 0.0226, 0.0239, 0.0251, 0.0263, 0.0275);\n    RB_SiO2 = new Array (0, 0.0298, 0.0622, 0.0954, 0.1283, 0.1606, 0.1921, 0.2228, 0.2528, 0.2819, 0.3104, 0.3382, 0.3653, 0.3919, 0.4179, 0.4434, 0.4685, 0.4930, 0.5172, 0.5409, 0.5643);\n    SB_SiO2 = new Array (0, 0.0143, 0.0252, 0.0342, 0.0418, 0.0483, 0.0540, 0.0590, 0.0634, 0.0674, 0.0710, 0.0743, 0.0774, 0.0801, 0.0827, 0.0851, 0.0874, 0.0895, 0.0914, 0.0933, 0.0951);\n    RP_SiO2 = new Array (0, 0.0108, 0.0199, 0.0292, 0.0388, 0.0486, 0.0586, 0.0688, 0.0792, 0.0896, 0.1002, 0.1108, 0.1215, 0.1322, 0.1429, 0.1537, 0.1644, 0.1752, 0.1859, 0.1966, 0.2073);\n    SP_SiO2 = new Array (0, 0.0048, 0.0084, 0.0119, 0.0152, 0.0185, 0.0216, 0.0247, 0.0276, 0.0305, 0.0333, 0.0360, 0.0387, 0.0412, 0.0437, 0.0461, 0.0485, 0.0507, 0.0529, 0.0551, 0.0571);\n    RAs_Si3N4 = new Array (0, 0.0060, 0.0099, 0.0135, 0.0169, 0.0202, 0.0235, 0.0268, 0.0301, 0.0334, 0.0367, 0.0400, 0.0433, 0.0467, 0.0500, 0.0534, 0.0568, 0.0603, 0.0637, 0.0672, 0.0706);\n    SAs_Si3N4 = new Array (0, 0.0020, 0.0033, 0.0045, 0.0056, 0.0066, 0.0077, 0.0087, 0.0097, 0.0108, 0.0118, 0.0127, 0.0137, 0.0147, 0.0157, 0.0167, 0.0176, 0.0186, 0.0195, 0.0205, 0.0214);\n    RB_Si3N4 = new Array (0, 0.0230, 0.0480, 0.0736, 0.0990, 0.1239, 0.1482, 0.1719, 0.1950, 0.2176, 0.2396, 0.2610, 0.2820, 0.3025, 0.3226, 0.3424, 0.3617, 0.3807, 0.3994, 0.4178, 0.4358);\n    SB_Si3N4 = new Array (0, 0.0111, 0.0196, 0.0267, 0.0326, 0.0377, 0.0422, 0.0461, 0.0496, 0.0527, 0.0555, 0.0581, 0.0605, 0.0627, 0.0647, 0.0666, 0.0684, 0.0700, 0.0716, 0.0731, 0.0744);\n    RP_Si3N4 = new Array (0, 0.0084, 0.0154, 0.0226, 0.0300, 0.0376, 0.0453, 0.0532, 0.0612, 0.0693, 0.0774, 0.0856, 0.0939, 0.1022, 0.1105, 0.1188, 0.1271, 0.1354, 0.1437, 0.1520, 0.1602);\n    SP_Si3N4 = new Array (0, 0.0037, 0.0065, 0.0092, 0.0118, 0.0143, 0.0168, 0.0192, 0.0215, 0.0237, 0.0259, 0.0280, 0.0301, 0.0321, 0.0340, 0.0358, 0.0377, 0.0394, 0.0411, 0.0428, 0.0444);\n    RAs_Si = new Array (0, 0.0150, 0.0262, 0.0368, 0.0473, 0.0577, 0.0682, 0.0788, 0.0894, 0.1001, 0.1109);\n    SAs_Si = new Array (0, 0.0056, 0.0096, 0.0133, 0.0169, 0.0204, 0.0237, 0.0269, 0.0302, 0.0334, 0.0368);\n    RB_Si = new Array (0, 0.0658, 0.1277, 0.1847, 0.2380, 0.2887, 0.3362, 0.3812, 0.4242, 0.4654, 0.5050);\n    SB_Si = new Array (0, 0.0270, 0.0423, 0.0526, 0.0605, 0.0669, 0.0721, 0.0764, 0.0801, 0.0833, 0.0862);\n    RP_Si = new Array (0, 0.0253, 0.0488, 0.0729, 0.0974, 0.1226, 0.1479, 0.1732, 0.1988, 0.2247, 0.2506);\n    SP_Si = new Array (0, 0.0114, 0.0201, 0.0288, 0.0367, 0.0445, 0.0516, 0.0581, 0.0642, 0.0702, 0.0762); \n\n    if (Substrate[0].checked && Dopant[0].checked) {RangeTable = RAs_Si; StraggleTable = SAs_Si; }\n    if (Substrate[0].checked && Dopant[1].checked) {RangeTable = RB_Si; StraggleTable = SB_Si;}\n    if (Substrate[0].checked && Dopant[2].checked) {RangeTable = RP_Si; StraggleTable = SP_Si;}\n    if (Substrate[1].checked && Dopant[0].checked) {RangeTable = RAs_AmorSi; StraggleTable = SAs_AmorSi;}\n    if (Substrate[1].checked && Dopant[1].checked) {RangeTable = RB_AmorSi; StraggleTable = SB_AmorSi;}\n    if (Substrate[1].checked && Dopant[2].checked) {RangeTable = RP_AmorSi; StraggleTable = SP_AmorSi;}\n    if (Substrate[2].checked && Dopant[0].checked) {RangeTable = RAs_SiO2; StraggleTable = SAs_SiO2;}  \n    if (Substrate[2].checked && Dopant[1].checked) {RangeTable = RB_SiO2; StraggleTable = SB_SiO2;}\n    if (Substrate[2].checked && Dopant[2].checked) {RangeTable = RP_SiO2; StraggleTable = SP_SiO2;}\n    if (Substrate[3].checked && Dopant[0].checked) {RangeTable = RAs_Si3N4; StraggleTable = SAs_Si3N4;}\n    if (Substrate[3].checked && Dopant[1].checked) {RangeTable = RB_Si3N4; StraggleTable = SB_Si3N4;}\n    if (Substrate[3].checked && Dopant[2].checked) {RangeTable = RP_Si3N4; StraggleTable = SP_Si3N4;}\n\n    Energy = parseFloat(IonEnergy.value);\n    if (Substrate[0].checked) {\n     index1 = Math.round(Energy\/20);\n     if (((Energy\/20) < index1) || (index1 == 10)) {index2 = index1-1;}\n      else {index2 = index1+1;}\n     if (index2 > index1) { mR = RangeTable[index2]-RangeTable[index1];}\n          else {mR = RangeTable[index1]-RangeTable[index2];}\n         Range.value = mR*((Energy\/20)-index1) + RangeTable[index1];\n         if (index2 > index1) { mS = StraggleTable[index2]-StraggleTable[index1];}\n          else {mS = StraggleTable[index1]-StraggleTable[index2];}\n    Straggle.value = mS*((Energy\/20)-index1) + StraggleTable[index1];\n    } else { \n      index1 = Math.round(Energy\/10);\n         if (((Energy\/10) < index1) || (index1 == 20)) {index2 = index1-1;}\n          else {index2 = index1+1;}\n         if (index2 > index1) { mR = RangeTable[index2]-RangeTable[index1];}\n          else {mR = RangeTable[index1]-RangeTable[index2];}\n         Range.value = mR*((Energy\/10)-index1) + RangeTable[index1];\n         if (index2 > index1) { mS = StraggleTable[index2]-StraggleTable[index1];}\n          else {mS = StraggleTable[index1]-StraggleTable[index2];}\n    Straggle.value = mS*((Energy\/10)-index1) + StraggleTable[index1];\n   } \n   }\n  }\n\n\/\/--><!]]>\n<\/script><h1 align=\"center\">Implant PR \u8ba1\u7b97\u8868<\/h1>\n<div align=\"center\">\n<center>\n<table border=\"0\" bordercolor=\"#111111\" cellpadding=\"0\" cellspacing=\"0\" height=\"239\" style=\"border-collapse: collapse\" width=\"60%\"><tbody><tr><\/tr><tr><td align=\"left\" height=\"20\" width=\"40%\">Substrate:<\/td>\n<td height=\"28\" width=\"60%\">&nbsp; <input align=\"left\" checked=\"checked\" name=\"Substrate\" type=\"radio\" value=\"0\"> Si<br>\n\t\t\t&nbsp; <input name=\"Substrate\" type=\"radio\" value=\"1\"> Amorphous Si<br>\n\t\t\t&nbsp; <input name=\"Substrate\" type=\"radio\" value=\"2\"> SiO<sub>2<\/sub><br>\n\t\t\t&nbsp; <input name=\"Substrate\" type=\"radio\" value=\"3\"> Si<sub>3<\/sub>N<sub>4<\/sub><\/td>\n<\/tr><tr><td align=\"left\" height=\"20\" width=\"40%\">Dopant:<\/td>\n<td height=\"28\" width=\"60%\">&nbsp; <input align=\"left\" checked=\"checked\" name=\"Dopant\" type=\"radio\" value=\"0\"> Arsenic<br>\n\t\t\t&nbsp; <input name=\"Dopant\" type=\"radio\" value=\"1\"> Boron<br>\n\t\t\t&nbsp; <input name=\"Dopant\" type=\"radio\" value=\"2\"> Phosphorus<\/td>\n<\/tr><tr><td align=\"left\" height=\"20\" width=\"40%\">Ion Energy:<\/td>\n<td height=\"20\" width=\"60%\"><input name=\"IonEnergy\" size=\"10\" type=\"text\" value=\"99\"><font face=\"Times New Roman\"> [keV] (0-200)<\/font><\/td>\n<\/tr><tr><td align=\"left\" colspan=\"2\" height=\"60\" width=\"100%\">\n<p align=\"center\"><input onclick=\"Calculate()\" type=\"button\" value=\"Calculate Range &amp; Straggle\"><\/p>\n<\/td>\n<\/tr><tr><td align=\"left\" height=\"20\" width=\"40%\">Projected Range:<\/td>\n<td height=\"20\" width=\"60%\"><input name=\"Range\" size=\"10\" type=\"text\" value=\"0\"><font face=\"Times New Roman\"> [um] <\/font><\/td>\n<\/tr><tr><td align=\"left\" height=\"20\" width=\"40%\">Projected Straggle:<\/td>\n<td height=\"20\" width=\"60%\"><input name=\"Straggle\" size=\"10\" type=\"text\" value=\"0\"><font face=\"Times New Roman\"> [um] <\/font><\/td>\n<\/tr><tr><td align=\"left\" colspan=\"2\" height=\"60\" width=\"100%\">\n<p align=\"left\">\n\t\t\t<\/p>\n<\/td>\n<\/tr><\/tbody><\/table><p><\/p><\/center>\n<\/div>\n<\/form>\n<\/div><\/div><\/div>\n  \n  \n<!-- \/.node -->\n  \n\n  \n \n\t\n\t  \n\t      \n\n\n\n  \n  \n\n\n\n\n\n<div class=\"wp-block-file\"><a id=\"wp-block-file--media-e746c3ef-04b8-4c58-b8ad-5a0ee150baf8\" href=\"https:\/\/blog.zengqq.com.cn\/wp-content\/uploads\/2022\/04\/Boron-in-SiC.txt\">Boron in SiC<\/a><a href=\"https:\/\/blog.zengqq.com.cn\/wp-content\/uploads\/2022\/04\/Boron-in-SiC.txt\" class=\"wp-block-file__button\" download aria-describedby=\"wp-block-file--media-e746c3ef-04b8-4c58-b8ad-5a0ee150baf8\">\u4e0b\u8f7d<\/a><\/div>\n","protected":false},"excerpt":{"rendered":"<p>Implant PR \u8ba1\u7b97\u8868 Substrate: [&#8230;]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[2730,89],"tags":[168,165,166,167,164],"class_list":["post-282","post","type-post","status-publish","format-standard","hentry","category-2730","category-live","tag-calculator","tag-implant","tag-pr","tag-range","tag-164"],"_links":{"self":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/282","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=282"}],"version-history":[{"count":3,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/282\/revisions"}],"predecessor-version":[{"id":2929,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/282\/revisions\/2929"}],"wp:attachment":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=282"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=282"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=282"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}