Pcomp\u5373Pressure Compensation(\u8154\u5ba4\u538b\u529b\u8865\u507f\u6280\u672f)\u6216\u8005\u4e5f\u53ebPhotoresist Compensation(\u5149\u523b\u80f6\u8865\u507f\uff09\u3002\u7f8e\u56fd\u4e9a\u820d\u5229(Axcelis)\u7684GSD\u7cfb\u5217\u79bb\u5b50\u690d\u5165\u673a\u662f\u6240\u6709\u789f\u5f62\u8f7d\u7247\u65cb\u8f6c\u690d\u5165\u673a\uff08disk loaded implanter\uff09\u4e2d\u552f\u4e00\u5f15\u5165\u4e86\u8154\u4f53\u538b\u529b\u4fee\u6b63\u7684\u79bb\u5b50\u6ce8\u5165\u673a\u3002\u800c\u8154\u5ba4\u538b\u529b\u8865\u507f\u6280\u672f\uff08Pcomp)\u5c31\u662fAxcelis\u5728GSD\u8fd9\u4e00\u7cfb\u5217\u673a\u578b\u7684\u6740\u624b\u950f\u3002\u5b83\u9664\u4e86\u6d4b\u91cf\u79bb\u5b50\u675f\u6d41\u5bc6\u5ea6\u3001\u7d2f\u79ef\u690d\u5165\u65f6\u95f4\u3001\u548c\u8ba1\u7b97\u6ce8\u5165\u9762\u79ef\uff0c\u8fd8\u80fd\u5229\u7528\u56de\u91c7\u8154\u4f53\u538b\u529b\u6570\u636e\u6765\u7cbe\u786e\u4f30\u7b97\u6d4b\u91cf\u79bb\u5b50\u675f\u6d41\u5bc6\u5ea6\u6d4b\u91cf\u7684\u504f\u5dee\uff0c\u5e76\u5bf9\u79bb\u5b50\u690d\u5165\u8fdb\u884c\u5b9e\u65f6\u5730\u8865\u507f\u3002Pcmop\u5b8c\u6210\u4e86\u79bb\u5b50\u690d\u5165\u5242\u91cf\u7684\u95ed\u73af\u63a7\u5236\uff0c\u8ba9\u539f\u5148\u7c97\u653e\u6027\u690d\u5165\u7cfb\u7edf\u53d8\u6210\u4e86\u5e26\u56de\u9988\u7684\u81ea\u6d3d\u7684\u7cbe\u786e\u690d\u5165\u7cfb\u7edf\u3002<\/p>\n\n\n\n
\u4e16\u754c\u4e0a\u5f88\u591a\u54c1\u724c\u7684\u79bb\u5b50\u6ce8\u5165\u673a\uff0c\u4ed6\u4eec\u6309\u7167\u540c\u65f6\u80fd\u591f\u5904\u7406\u7684wafer\u7247\u6570\uff0c\u5927\u81f4\u5206\u4e3a\u5355\u7247\u548c\u591a\u7247(\u6279\u91cf\u578b)\u690d\u5165\u4e24\u5927\u7c7b\uff0c12\u5bf8\u4ee5\u540e\u7684\u673a\u5668\u5927\u90fd\u91c7\u7528\u4e86\u5355\u7247\u690d\u5165\u3002\u4e0a\u4e16\u7eaa80\u5e74\u4ee3\u523021\u4e16\u7eaa\u521d6\u5bf8\u548c8\u5bf8\u4e16\u4ee3\u7684\u673a\u5668\uff0c\u5305\u62ecAMAT\uff08\u7f8e\u56fd\u5e94\u7528\u6750\u6599\u516c\u53f8\uff09\u539f\u81ea\u4e3b\u8bbe\u8ba1\u7684QuantunIII\u3001X\uff08\u91cf\u5b503\uff0cX\u7cfb\u5217\uff09\uff0cVarian\uff08\u7f8e\u5546\u74e6\u5229\u5b89\uff0c\u540e\u6765\u88abAMAT\u6536\u8d2d\uff09\u8bbe\u8ba1\u7684Viision III\u690d\u5165\u673a\uff0cAxcelis\u7684GSD\uff08\u9640\u87ba\u63a7\u5236\u8d85\u7ea7\u789f\u5f62\u8f7d\u7247\u673a\u578b\u578b\u7cfb\u5217\uff09\u90fd\u662f\u591a\u7247\u690d\u5165\u7684\u673a\u578b\u3002\u591a\u7247\u690d\u5165\u673a\u7684\u673a\u578b\u4e4b\u6240\u4ee5\u5b58\u5728\uff0c\u662f\u56e0\u4e3a\u5176\u6709\u5f88\u9ad8\u7684\u5904\u7406\u6548\u7387\u540c\u65f6\u80fd\u5904\u740613\u523018\u7247wafer\u8fd9\u662f\u5355\u7247\u673a\u578b\u7684\u5341\u51e0\u500d\uff0c\u4f46\u662f\u5b83\u4e5f\u6709\u5f88\u5927\u7684\u7f3a\u9677\u3002\u7531\u4e8e\u5b83\u9700\u8981\u5efa\u9020\u548c\u7ef4\u62a4\u8d85\u5927\u7684\u771f\u7a7a\u8154\u5ba4\u5bb9\u7eb3\u7528\u6765\u653e\u7f6ewafer\u7684\u94dd\u5408\u91d1\u789f\u7247\uff08\u534a\u5f84570~850mm\uff0c\u76f4\u5f84\u5c06\u8fd11.4\u7c73\u81f31.9\u7c73\uff09\uff0c\u53e6\u5916\u7531\u4e8e\u789f\u5f62\u8f7d\u7247\u9700\u8981\u9ad8\u901f\uff08512RPM~613RPM\uff09\u6216\u8005\u8d85\u9ad8\u901f\uff081200RPM~1215RPM\uff09\u65cb\u8f6c\u6765\u6ee1\u8db3\u690d\u5165\u7684\u5747\u5300\u5ea6\uff0c\u8fd9\u5bf9\u771f\u7a7a\u63a7\u5236\u6c34\u5e73\u8fd8\u6709\u9ad8\u901f\u65cb\u8f6c\u4e0b\u7684\u7c89\u5c18\u649e\u51fb\u538b\u5236\u90fd\u63d0\u51fa\u4e86\u6781\u9ad8\u7684\u8981\u6c42\uff0c\u5728\u6280\u672f\u53d1\u5c55\u76f8\u5bf9\u6ede\u540e\u7684\u524d\u63d0\u4e0b\uff0c\u81ea21\u4e16\u7eaa\u521d\u5404\u56fdFab\u9010\u6e10\u5730\u5404\u56fd\u90fd\u653e\u5f03\u4e86\u789f\u7247\u6279\u91cf\u578b\u690d\u5165\u673a\u3002\u4f46\u662f\u968f\u7740\u672a\u6765\u63a7\u5236\u6280\u672f\u7684\u63d0\u5347\uff0c\u548c\u9ad8\u771f\u7a7a\u9886\u57df\u7684\u8fdb\u6b65\uff0c\u789f\u7247\u6279\u91cf\u578b\u690d\u5165\u673a\u8fd8\u662f\u4f1a\u518d\u6b21\u56de\u5230\u7ade\u4e89\u4e2d\u6765\uff0c\u8fd9\u81ea\u7136\u662f\u540e\u8bdd\u3002\u800c\u76ee\u524d\uff0c\u5168\u7403\u4f9d\u7136\u6709\u4e0d\u5c11\u76846\u5bf8\u548c8\u5bf8\u7ebfFab\u4f9d\u7136\u4fdd\u6709\u5927\u91cf\u7684GSD\uff0c\u4ed6\u4eec\u8fd8\u5728\u4e3a\u5206\u7acb\u5668\u4ef6\uff0c\u6a21\u62df\u5668\u4ef6\uff0c\u8f66\u8f7d\u7535\u5b50\u7cfb\u7edf\u82af\u7247\uff0c\u529f\u7387\u534a\u5bfc\u4f53\u8bbe\u5907\u7684\u5236\u9020\u53d1\u6325\u4f59\u70ed\u3002<\/p>\n\n\n\n
Pcomp\u8154\u5ba4\u538b\u529b\u8865\u507f<\/p>\n\n\n\n
\u4f55\u4e3aPcomp\uff1f\u4e3a\u4ec0\u4e48\u9700\u8981Pcomp\uff1f<\/p>\n\n\n\n
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\u8865\u507f\u503c\u7684\u9884\u8bbe\u3002<\/p>\n\n\n\n
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Pcomp\u5373Pressure Compensati […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[357,243,249],"tags":[452,975,977,976],"class_list":["post-2483","post","type-post","status-publish","format-standard","hentry","category-zero2hero","category-work","category-technology","tag-gsd","tag-pcomp","tag-977","tag-976"],"_links":{"self":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/2483","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=2483"}],"version-history":[{"count":2,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/2483\/revisions"}],"predecessor-version":[{"id":2488,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/2483\/revisions\/2488"}],"wp:attachment":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=2483"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=2483"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=2483"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}