{"id":248,"date":"2019-08-25T23:41:16","date_gmt":"2019-08-25T15:41:16","guid":{"rendered":"http:\/\/47.242.20.44\/?p=248"},"modified":"2019-08-25T23:41:16","modified_gmt":"2019-08-25T15:41:16","slug":"%e5%a6%82%e4%bd%95%e7%ae%a1%e7%90%861000%e4%b8%aadtf","status":"publish","type":"post","link":"https:\/\/blog.zengqq.com.cn\/?p=248","title":{"rendered":"\u5982\u4f55\u7ba1\u74061000\u4e2aDTF"},"content":{"rendered":"\n
  1. DTF(Dose Trim Factor) be used for dose rectification widely\u5242\u91cf\u4fee\u6574\u56e0\u5b50\u5e94\u7528\u4e8e:
    1. Rectifies and modulates dosimetry diversity which essentially different with others (for specie or for energy\u2026) \u7edf\u4e00\u4e00\u4e9b\u8bbe\u5b9a\u5242\u91cf\u76f8\u540c\u4f46\u690d\u5165\u5143\u7d20\u6216\u8005\u8f70\u51fb\u80fd\u91cf\u4e0d\u540c\uff0c\u800c\u9020\u6210\u7684\u539f\u751f\u7684\u5242\u91cf\u5dee\u5f02<\/li>
    2. A compensating method to benchmark machines in an integrated group to simplify the recipe management globally \u5728\u4e0d\u540c\u673a\u5668\u4e4b\u95f4\u5bf9\u6027\u80fd\u5dee\u5f02\u9020\u6210\u7684\u504f\u5dee\u8fdb\u884c\u8865\u507f\uff0c\u4ece\u800c\u5c06\u5176\u7f16\u7ec4\uff0c\u65b9\u4fbf\u5b9e\u884c\u7ec4\u5185\u7edf\u4e00\u5316\u7ba1\u7406<\/li>
    3. Corresponding to the certain Pcomp% in recipe level to fine tune implant dose \u548c\u5bf9\u5e94\u7684\u4ed3\u538b\u4fee\u6b63\u503c\u4e00\u540c\u4f5c\u7528\uff0c\u5b9e\u65f6\u8c03\u6574\u690d\u5165\u5242\u91cf\uff0c\u4ee5\u671f\u8ba9\u4ed3\u538b\u4fee\u6b63\u8fc7\u540e\u7684\u690d\u5165\u66f4\u52a0\u8d8b\u8fd1\u4e8e\u7406\u8bba\u503c<\/li><\/ol><\/li>
    4. What dose it makes a big problem when handling 1000 DTFs global ?\u4e3a\u4f55\u5168\u5c40\u5316\u7684\u7ba1\u74061000\u4e2aDTF\u5f88\u9ebb\u70e6\uff1f
      1. Existing recipes holding their owner DTF as their owner target of dose \u6bcf\u4e2arecipe\u90fd\u6709\u81ea\u5df1\u72ec\u7279\u7684\u5242\u91cf\uff0c\u8fd9\u79cd\u5242\u91cf\u662fDose\u548cTF\u7684\u4e58\u79ef\uff0c\u4e8b\u540e\u5f88\u96be\u5355\u7eaf\u5730\u5c06TF\u62bd\u79bb\u51fa\u6765\u7ba1\u7406<\/li>
      2. Single recipe already be rectified by maybe different TF in different tool mistakenly ,in some case ,which quite difficult to redefine the correct TF for those tool ,as no traceabilty for tool problem ,and more worse case is ,\u201ccurrently how many TF were mis-defined\u201d is unknown,some sensitive recipes already be correct back but some non-sensitive recipe still in a wrong TF.it\u2019s confusing.\u5355\u72ec\u7684recipe\u6709\u53ef\u80fd\u5728\u5b58\u5728\u4e0d\u540c\u7684TF\uff0c\u6709\u4e9b\u662f\u56e0\u4e3a\u5f53\u65f6machine\u6709\u95ee\u9898\uff0c\u5728\u4e0d\u5f97\u5df2\u6216\u8005\u4e0d\u660e\u771f\u76f8\u7684\u60c5\u51b5\u4e0b\u4f7f\u7528\u4e86\u4e00\u4e2a\u6709\u8bef\u5dee\u7684TF\uff0c\u4e4b\u540e\u6709\u4e9brecipe\u56e0\u4e3a\u8f83\u4e3a\u654f\u611f\u51fa\u95ee\u9898\u540e\u88ab\u4fee\u6b63\u4e86\uff0c\u7136\u800c\u6709\u4e9brecipe\u5bf9\u4e8e\u5242\u91cf\u5e76\u4e0d\u654f\u611f\uff0c\u8fd9\u4e5f\u5c31\u9020\u6210\u8fd9\u4e9bTF\u5b58\u5728\u4e0b\u53bb\uff0c\u4e8e\u662f\u5bf9\u4e8e\u540c\u4e00\u5242\u91cf\u5f80\u5f80\u6709\u591a\u4e2aTF\uff0c\u8fd9\u6837\u5f88\u96be\u7b80\u5355\u7684\u627e\u51fa\u5bf9\u7684TF<\/li><\/ol><\/li>
      3. How to manage total one thousand DTFs\u5982\u4f55\u6b63\u786e\u7ba1\u74061000\u4e2aDTF?
        1. sort those DTF based on \u5206\u800c\u6cbb\u4e4b
          • Necessary \u9700\u8981\u72ec\u7279\u7684DTF\u7684\uff0c\u4f8b\u5982\u8981\u548cPcomp\u4e00\u8d77\u4f7f\u7528<\/li>
          • Non necessary \u4e0d\u592a\u9700\u8981DTF\u7684 \u5bf9\u4e8edose\u4e0d\u662f\u5f88\u654f\u611f\uff08\u4e00\u822c\u662f\u8d85\u9ad8\u5242\u91cf\u7684\uff09<\/li>
          • No \/ Forbidden \u7981\u6b62\u4f7f\u7528\u72ec\u7279\u7684DTF\uff0c\u53ea\u80fd\u7528\u7edf\u4e00\u7684DTF\uff08\u5927\u90e8\u5206recipe\u88ab\u8981\u6c42\u5982\u6b64\uff09<\/li><\/ul><\/li>
          • Establish DTF traceability system DTF\u7684\u53ef\u8ffd\u6eaf\u6027\uff0c\u884d\u751f\u7684\u53ef\u63a7\u6027
            • Golden tool (tool type) \u5b8c\u7f8e\u673a\u4f53\u5236\u5ea6<\/li>
            • \u201cMother fab\u201d dope wafer Rs verification \u9700\u8981\u4ece\u6bcd\u5382\u5bc4\u9001\u6837\u54c1\uff0c\u968f\u5236\u7a0b\u4e00\u8d77\u9001\u81f3\u5b50\u5382\u9a8c\u8bc1DTF\u77eb\u6b63\u7ed3\u679c<\/li>
            • Legacy DTF localization \u4e8c\u671fDTF\u672c\u571f\u5316\u8f6c\u79fb\u6d41\u7a0b
              Retrieve all DTF\u2019s changing\/control right from device and release dose changing or control right to third party \u6536\u56deDTF\u7ba1\u7406\u6743\uff0c\u5f15\u5bfc\u5916\u754c\u63a5\u53d7\u6b63\u89c4\u7684Dose\u53d8\u66f4\u6d41\u7a0b<\/li>
            • Group control on DTF \u5728\u8bef\u5dee\u53ef\u63a5\u53d7\u8303\u56f4\u5185\u7b80\u5316\u5e76\u96c6\u4e2d\u7ba1\u7406DTF\uff0c\u76f8\u540c\u8bef\u5dee\u8303\u56f4\u7684\u653e\u5165\u540c\u4e00\u4e2aDTF\u7ec4 <\/li><\/ul><\/li><\/ol><\/li><\/ol>\n","protected":false},"excerpt":{"rendered":"

              DTF(Dose Trim Factor) be […]<\/p>\n","protected":false},"author":2,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[89],"tags":[],"class_list":["post-248","post","type-post","status-publish","format-standard","hentry","category-live"],"_links":{"self":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/248","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/users\/2"}],"replies":[{"embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=248"}],"version-history":[{"count":0,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=\/wp\/v2\/posts\/248\/revisions"}],"wp:attachment":[{"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=248"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=248"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/blog.zengqq.com.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=248"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}